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半導(dǎo)體真空閥門維修

邁格諾科提供快速、高質(zhì)量且有制造能力保證半導(dǎo)體設(shè)備真空閥門維保服務(wù)。我們不僅僅是一家半導(dǎo)體核心精密零組件及真空閥門和真空以及特氣管路的供應(yīng)商，并且是一家擁有全套的檢測(cè)設(shè)備、豐富的維修經(jīng)驗(yàn)、專業(yè)的技工團(tuán)隊(duì)的半導(dǎo)體設(shè)備真空閥門維保廠家。

  • 尺寸參數(shù)
  • 產(chǎn)品特性


          邁格諾科提供快速、高質(zhì)量且有制造能力保證的半導(dǎo)體設(shè)備真空閥門維保服務(wù)。我們不僅僅是一家半導(dǎo)體核心精密零組件及真空閥門和特氣管路的供應(yīng)商，并且是一家擁有全套的檢測(cè)設(shè)備、豐富的維修經(jīng)驗(yàn)、專業(yè)的技工團(tuán)隊(duì)的半導(dǎo)體設(shè)備真空閥門維保廠家。邁格諾科有能力維修業(yè)內(nèi)各廠家的真空閥門如日本SMC全系列真空角閥、矩形傳輸閥；瑞士VAT全系列真空閘閥、真空蝶閥、真空門閥;美國(guó)MKS全系列角閥、蝶閥。以及V-TEX、AMAT、NC、HVA等眾多品牌。我們能夠修復(fù)受損的閥門零件和結(jié)構(gòu)，也能重新制造標(biāo)準(zhǔn)真空閥門及提供閥門維修零件包。
         邁格擁有完整的半導(dǎo)體潔凈等級(jí)維修流程及標(biāo)準(zhǔn)的維修作業(yè)程序，來(lái)保證客戶的真空閥能夠正常運(yùn)作并效恢復(fù)效能。
         為了確保每一個(gè)維修過(guò)的產(chǎn)品功能如新，我們盡可能采用原廠的材料及標(biāo)準(zhǔn)。為此，我們配備眾多國(guó)際一線的專業(yè)的檢測(cè)設(shè)備，如美國(guó)奧林巴斯光譜儀、海克斯康三坐標(biāo)、硬度計(jì)、英福康檢漏儀、閥門壽命測(cè)試設(shè)備以及滿足SEMI標(biāo)準(zhǔn)，通過(guò)第三方認(rèn)證百級(jí)潔凈間等。
         如有需求，請(qǐng)聯(lián)系我們的服務(wù)郵箱service@magnox.com.cn
產(chǎn)業(yè)類別 制程區(qū)域 設(shè)備制造商 型號(hào) 制程 閥門制造商 產(chǎn)品編號(hào) 產(chǎn)品名稱 原廠料號(hào)/規(guī)格 產(chǎn)品圖片
半導(dǎo)體 T/F AMAT Endura 5500 CVD-TiN AMAT TPV-001 8"TxZ Throttle Valve 0010-09035
0010-37768
0010-09035
0010-38027
半導(dǎo)體 T/F
ETCH 		AMAT P-5000 W-CVD AMAT TPV-002 6"WCVD Throttle Valve 0010-10082
半導(dǎo)體 T/F AMAT Centura II TIV AMAT TPV-003 12"BWCVD Throttle valve 0010-17151
0040-05469
0040-09022
半導(dǎo)體 T/F AMAT P-5000
Centura5200 		SSIN
BPSG
DARC C
TEOS
SA-CVD 		AMAT TPV-004 6"SA Throttle Valve
半導(dǎo)體 T/F AMAT Centura 5200 TEOS
SA-CVD 		AMAT TPV-005 8"SA-CVD Throttle Valve
8"TEOS/DxZ ThrottleValve 		0010-10778
0090-0034-001
半導(dǎo)體 T/F AMAT P-5000 TEOS AMAT TPV-006 6"TEOS Throttle Valve 0010-09301
半導(dǎo)體 T/F AMAT Endura 5500 Copper Seed AMAT TPV-007 PC3 Throttle Valve 0240-28146
0010-09019
半導(dǎo)體 T/F AMAT Centura 5200 SA-CVD
TEOS 		AMAT TPV-013 Centura Σ 0010-02142
半導(dǎo)體 T/F AMAT Producer SA-CVD
BPSG 		AMAT TPV-015 SA Producer Throttle valve 0010-09857
0010-26231-001
0010-37140
半導(dǎo)體 T/F AMAT P-5000 Nitride AMAT TPV-020 6"Nitride Throttle valve 0010-76175
半導(dǎo)體 T/F AMAT Centura.12" PCV AMAT TPV-036 HDP Throttle vavle PK243A2A-SG36
半導(dǎo)體 ETCH AMAT Centura 5200 Poly AMAT TPV-109 MxP / Super-E ChamberThrottle Valve
半導(dǎo)體 T/F AMAT Centura 5200 HDP AMAT TPV-111 DDTV. Throttle Valve 0010-08384-12939900-166
半導(dǎo)體 T/F AMAT Endura 5500
Centura 5200 		Mainfiram AMAT SVA-001 8"Bellows assembly Slitvalve
(TSMC 料號(hào) 30026688) 		0020-22412、0010-26966
0010-01287、0020-20345
0010-15287、0010-76428
半導(dǎo)體 ETCH AMAT Centura 5200 WAFER.LIFT,
ASSEMBLY,
Preclean 2 		AMAT SVA-002 Slit Valve Bellow Assembly 0010-20753
半導(dǎo)體 D/F RTP AMAT SVA-016 Slit Valve 0040-75863 REV003
半導(dǎo)體 T/F AMAT Endura 5500
Endura Il 		SPD AMAT SVA-102 300mm Slit Valve Assembly 3020-00077
半導(dǎo)體 D/F AMAT RTO-06 DPN AMAT SVA-103 DPN Chamber Imner DoorA ssembly NCDO2B50-75DC
半導(dǎo)體 T/F Novellus INOVA VAT SVA-107 Slit Valve 03012-LA24-0001
02112-BA24-APNI


產(chǎn)業(yè)類別 制程區(qū)域 設(shè)備制造商 型號(hào) 制程 閥門制造商 產(chǎn)品編號(hào) 產(chǎn)品名稱 原廠料號(hào)/規(guī)格 產(chǎn)品圖片
半導(dǎo)體 T/F AMAT Centura 5200 PVD VAT GAT-001 Gate Valve 0190-35101
(17432-kf21-1001)
半導(dǎo)體 D/F HVA Quantum IMP HVA GAT-002 Cryo-Pump Gate Valve 11210-1201r-002
半導(dǎo)體 T/F Novellus Vector HDP SMC GAT-003 L-Motion Gate Vlave XGT-300-30
60-251903-00
XGT312-50336-1A
半導(dǎo)體 D/F Varian Viision IMP VAT GAT-004 Source
Turbo-pump Gate valve 		14048-PE44
半導(dǎo)體 D/F Varian EHP1500 IMP VAT GAT-005 Cryo-pump gate valve 12150-PA44
半導(dǎo)體 T/F Novellus INOVA PVD VAT GAT-006 Valve Gate KF63,2.5 inch 14036-PE24-ARV1
半導(dǎo)體 T/F TEL Vector HDP SMC GAT-007 L-Motion Gate Vlave XG312-50336-1F-X179
半導(dǎo)體 T/F TEL   CVD V-TEX GAT-008 Roll cam Gate Valve CX12-000004-21
半導(dǎo)體 T/F AMAT   CVD V-TEX GAT-009 Roll cam Gate Valve CX12-000002-31
半導(dǎo)體 T/F AMAT Producer EDWARDS
MANUAL 		VAT GAT-010 VALVE ISO100 B90000220
半導(dǎo)體 T/F AMAT Endura Il CVD-TIN VAT GAT-011 VALVE ISO100 G09290620 
半導(dǎo)體 T/F AMAT Endura Il PNEUMATIC
8"CF RPG 		VAT GAT-012 Gate Vlave 10846-UE24-ALK1
10846-XE28-AAX2
半導(dǎo)體 D/F Axcelis NV-GSD IMP - GAT-013 Gate Vlave 10562-29-95
半導(dǎo)體 D/F Axcelis HE MP IMP VAT GAT-014 Gate Vlave 08038-FA24-1002
08140-FA24-A1B1
半導(dǎo)體 D/F Vista 80810 IMP VAT GAT-015 Gate Vlave 9400X-XA240-ABV2
半導(dǎo)體 T/F - - - VAT GAT-016 Gate Vlave N03933800.GV1075N1
半導(dǎo)體 T/F - - - VAT GAT-017 Gate Vlave 14040-PE44
半導(dǎo)體 T/F ASM HVA - HVA GAT-018 Gate Vlave 11212-0203
半導(dǎo)體 D/F Varian E500 IMP VAT GAT-019 Source and beamlinegate valve 12036-PA14-0002
半導(dǎo)體 D/F TEL ALPHA 303I HVA GAT-020   HAND Valve手動(dòng)閥 11110-0603
半導(dǎo)體 T/F Novellus VAT - VAT GAT-021 SEALKITVALVE阻隔閥 01034KE24-1003
半導(dǎo)體 D/F Vista 80 - VAT GAT-022 turbo-pump gate avlve 12144-PA24-AFT1
半導(dǎo)體 D/F Axcelis HE3 V2 VAT GAT-023 HEI V2 Valve 08038-FA24-1002
半導(dǎo)體 T/F ASM - - HVA GAT-024 Gate Valve 11110-0203
半導(dǎo)體         VAT GAT-025 Pendulum Valve 65046-PA
半導(dǎo)體         Nor-Cal GAT-026 Pendulum Valve 3870-04672
半導(dǎo)體         VAT GAT-027 Pendulum Valve 65050
半導(dǎo)體         VAT GAT-028 Pendulum Valve 16548-PA21
半導(dǎo)體 T/F NVLs/AMAT   ETCH VAT GAT-029 Pendulum Valve 65040-PA52-AWV1
半導(dǎo)體 T/F       VAT GAT-030 Gate Valve 64040-PE52-1009
半導(dǎo)體 ETCH     ETCH VAT GAT-031 Gate Valve 12046-PE24-AAG1
半導(dǎo)體 T/F AMAT Centura   VAT GAT-032 Gate Valve 12048-PA44
半導(dǎo)體 ETCH   ASM ETCH HVA GAT-033 Gate Valve 13210-0153
半導(dǎo)體 D/F AMAT     HVA GAT-034 Gate Valve 21251-10037-001
半導(dǎo)體 T/F       VAT GAT-035 Gate Valve 12146-PA24-AGK1
半導(dǎo)體 D/F   TEL   HVA GAT-036 Gate Valve GVI160P
半導(dǎo)體 T/F   VISTA810   VAT GAT-037 Gate Valve  VGA160IEP1
半導(dǎo)體         VAT GAT-038 Gate Valve 65046-JH52-ADI2
半導(dǎo)體 T/F   Producer GT   VAT GAT-039 Gate Valve COMBO 控壓閥 95238-PAGO-ADH1
半導(dǎo)體 T/F       VAT GAT-040 Gate Valve 16852-JA28-ACY1
半導(dǎo)體           GAT-041 Gate Valve 3870-03243  
半導(dǎo)體     E-GUN   HVA GAT-042 Gate Valve  
半導(dǎo)體 ETCH     LAM VAT GAT-043 Pendulum Valve 65048-PH52-AFS1
半導(dǎo)體 T/F       Nor-Cal GAT-044 Pendulum Valve 3870-00998
半導(dǎo)體 T/F ULVAC Z-1000 VAC HVA GAT-101 SLIT Gate Valve 02010BA-24-86557
半導(dǎo)體 D/F TEL VAT   VAT GAT-102 Gate Valve 12044-PA24-1002
半導(dǎo)體 D/F AMAT Centura L/ Trubo TXZ VAT GAT-103 Gate Valve  08040-FA24AAJ1
半導(dǎo)體 T/F AMAT Centura MO VAT GAT-104 Gate Valve 12040-PA24-ABZ1
半導(dǎo)體 ETCH AMAT Centura POLY VAT GAT-105 Gate Valve 12040-FE24-1004
半導(dǎo)體 T/F ASM EAGLE-10
TEOS 		UNICAM V-TEX GAT-106 Gate Valve  
半導(dǎo)體 T/F   VAT HDP VAT GAT-107 Gate Valve 10846-UE24-AAM1
半導(dǎo)體 T/F AMAT Producer SA CVD HVA GAT-108 Valve Gate3"N/CW/ 0-0373 021010-1
半導(dǎo)體 T/F AMAT Endura 5500 CVD-TiN AMAT TPV-001 8"TxZ Throttle Valve 0010-09035
0010-37768
0010-09035
0010-38027
半導(dǎo)體 T/F
ETCH 		AMAT P-5000 W-CVD AMAT TPV-002 6"WCVD Throttle Valve 0010-10082
半導(dǎo)體 T/F AMAT Centura II TIV AMAT TPV-003 12"BWCVD Throttle valve 0010-17151
0040-05469
0040-09022
半導(dǎo)體 T/F AMAT P-5000
Centura5200 		SSIN
BPSG
DARC C
TEOS
SA-CVD 		AMAT TPV-004 6"SA Throttle Valve  
半導(dǎo)體 T/F AMAT Centura 5200 TEOS
SA-CVD 		AMAT TPV-005 8"SA-CVD Throttle Valve
8"TEOS/DxZ ThrottleValve 		0010-10778
0090-0034-001
半導(dǎo)體 T/F AMAT P-5000 TEOS AMAT TPV-006 6"TEOS Throttle Valve 0010-09301
半導(dǎo)體 T/F AMAT Endura 5500 Copper Seed AMAT TPV-007 PC3 Throttle Valve 0240-28146
0010-09019
半導(dǎo)體 T/F AMAT Producer PECVD
OXIDE 		MKS TPV-008 Producer Valve 253B-16083
253B-15083
253B-21977
253B-26661
253B-14340
半導(dǎo)體 T/F AMAT Centura 5200 HTF MKS TPV-009 HTF Process Chamber PCV Valve
RTP Buffer Chamber PCV Valve 		253B-11203
253B-13964
半導(dǎo)體 T/F AMAT Centura 5200 HTF MKS TPV-010 HTF Process Chamber PCV Valve
RTP Buffer Chamber PCV Valve 		253B-14570
253B-20-40-1
253B-16182
半導(dǎo)體 ETCH GaSonic/IPC L3500 Asher MKS TPV-011 Asher Chamber Throttle valve 253B-11020
半導(dǎo)體 T/F Novellus C1 PECVD
SiH4 		MKS TPV-012 Load Lock Throttle valve 2" KF50 253A 253A-12457
253B-13264
半導(dǎo)體 T/F AMAT Centura 5200 SA-CVD
TEOS 		AMAT TPV-013 Centura Σ 0010-02142
半導(dǎo)體 ETCH PSC PSC Asher MKS TPV-014 Producer Valve 96045136L
半導(dǎo)體 T/F AMAT Producer SA-CVD
BPSG 		AMAT TPV-015 SA Producer Throttle valve 0010-09857
0010-26231-001
0010-37140
半導(dǎo)體 T/F MKS Producer MKS MKS TPV-016 Throttle valve 653B-18552
半導(dǎo)體 T/F AMAT Centura 5200 IISG MKS TPV-017 PCV Throttle Valve 253B-14579
253B-12237
半導(dǎo)體 T/F AMAT Producer BSG MKS TPV-018 PE Throttle valve 683B-24562
半導(dǎo)體 T/F AMAT Producer USG MKS TPV-019 SA Throttle vlave 683B-23795
半導(dǎo)體 T/F AMAT P-5000 Nitride AMAT TPV-020 6"Nitride Throttle valve 0010-76175
半導(dǎo)體 T/F AMAT Producer SE SA-CVD MKS TPV-021 MKS SA Throttle valve 683B-26033
683B-24617
半導(dǎo)體 T/F AMAT DPSII URBO PUM MKS TPV-022 ISOValve 153F-16063
半導(dǎo)體 T/F AMAT     Tylan TPV-023 Throttle vavle PH265-02
半導(dǎo)體 T/F AMAT     Tylan TPV-024 Throttle vavle MX4OJIK18SIN
半導(dǎo)體 T/F AMAT     MKS TPV-025 Throttle vavle 253B
半導(dǎo)體 T/F AKT AKT
4300/5500 		AKT
4300/5500 		MKS TPV-026 Throttle vavle 653B-13071
半導(dǎo)體 T/F AKT AKT
4300/5500 		AKT
4300/5500 		MKS TPV-027 Throttle vavle 653B-22815
半導(dǎo)體 T/F AMAT producer HDP Chamber MKS TPV-028 Throttle vavle 153D-15973
半導(dǎo)體 T/F AMAT producer HDP Chamber MKS TPV-029 Throttle vavle 153D-15006
半導(dǎo)體 T/F LAN LAN 9400
Novellus C1 		Polly MKS TPV-030 Throttle vavle 253B-13264
半導(dǎo)體 T/F AMAT     MKS TPV-031 Throttle vavle RSX-S
半導(dǎo)體 T/F AMAT     MKS TPV-032 Throttle vavle RSX-100J
半導(dǎo)體 T/F AVIZA
ALD 		TTV PCV MKS TPV-034 Throttle vavle T3BIA-25947
半導(dǎo)體 T/F TEL ALPHA 303 PCV MKS TPV-035 Throttle vavle 2020448-001(T3BIA27547)
半導(dǎo)體 T/F AMAT Centura.12" PCV AMAT TPV-036 HDP Throttle vavle PK243A2A-SG36
半導(dǎo)體 T/F   Novellus NC Nor-Cal TPV-037 Throttle vavle 22-2844
半導(dǎo)體 T/F AMAT Centura PCV MKS TPV-038 Throttle vavle 253B-24627
半導(dǎo)體 T/F     SA MKS TPV-039 Throttle vavle T3BIA-27242
半導(dǎo)體 T/F AMAT Centura RTP MKS TPV-040 DIG EXH THROTTLEDNET 2"Flapper w T3BIA-26711
半導(dǎo)體 T/F TEL DWTWSI APC MKS TPV-041 Throttle vavle HV-50N
半導(dǎo)體 T/F AMAT   PCV MKS TPV-042 Throttle vavle S00106867
半導(dǎo)體 T/F AMAT Producer   MKS TPV-045 Throttle vavle 653B-14814
半導(dǎo)體 T/F ULVACE PSK
韓國(guó)去光阻 		PSK MKS TPV-046 Throttle vavle 653B-4-100-2
半導(dǎo)體 T/F ULVACE     MKS TPV-047 Throttle vavle T3BIA-27921
半導(dǎo)體 T/F AMAT Centura   MKS TPV-048 Throttle vavle 683B-26871
半導(dǎo)體 D/F AMAT RTP MF PCV Nor-Cal TPV-049 Throttle vavle 3870-04672
半導(dǎo)體 T/F LAM
BEVEL 		    MKS TPV-051 Throttle vavle 253B-26766
半導(dǎo)體 T/F       Tylan TPV-053 Throttle vavle MDVX030IT
半導(dǎo)體 D/F         TPV-054 Throttle vavle T3BIA-27547
半導(dǎo)體 T/F AMAT Producer SA-CVD   TPV-101 Throttle vavle  
半導(dǎo)體 T/F     TEOS MKS TPV-102 Throttle vavle 683B
半導(dǎo)體 ETCH TEL 85 DRM /
88 SCCM 		Poly Etch VAT TPV-103 Throttle vavle 61144-PH52-AAM1
半導(dǎo)體 T/F AMAT Centura 5200 PCV MKS TPV-106   253B
半導(dǎo)體 T/F TEL EP Ti2C14 Tylan TPV-107 APC valve MX50KFV15SSN
半導(dǎo)體 D/F AMAT Producer TEOS MKS TPV-108 Producer Valve 253B-23957
253B-26278
半導(dǎo)體 ETCH AMAT Centura 5200 Poly AMAT TPV-109 MxP / Super-E ChamberThrottle Valve  
半導(dǎo)體 T/F AMAT Centura 5200 HDP AMAT TPV-111 DDTV. Throttle Valve 0010-08384-12939900-166
半導(dǎo)體 T/F AMAT Novellus HDp MKS TPV-112 Throttle valve 253B-15665
半導(dǎo)體 T/F Novellus Sequel CVD MKS TPV-113 BTILN Buffer Chamnber PCV  253B-20401
半導(dǎo)體 T/F AMAT RTP CORA MKS TPV-114 APC Throttle Valve. 253B-2-50-1
半導(dǎo)體 T/F AMAT Producer HDP MKS TPV-117 WTS Throttle Valve :253B-15416
半導(dǎo)體 T/F WL WIT1000 CVD MKS TPV-118 Throttle Valve NKS 253B-11102
半導(dǎo)體 T/F AMAT Endura 5500
Centura 5200 		Mainfiram AMAT SVA-001 8"Bellows assembly Slitvalve
(TSMC 料號(hào) 30026688) 		0020-22412、0010-26966
0010-01287、0020-20345
0010-15287、0010-76428
半導(dǎo)體 ETCH AMAT Centura 5200 WAFER.LIFT,
ASSEMBLY,
Preclean 2 		AMAT SVA-002 Slit Valve Bellow Assembly 0010-20753
半導(dǎo)體 T/F AMAT Producer   VAT SVA-003 L/Ldoor 0750XUE24-AAL8/0273
0010-01711
0010-01711
半導(dǎo)體 T/F ULVAC ENTRON   V-TEX SVA-004 Slit Valve Cylinder 02110-BA24
半導(dǎo)體 T/F AMAT Producer   VAT SVA-005 Slit valve Bellows Assembly 07512-UA24
半導(dǎo)體 T/F TEL V-TEX   V-TEX SVA-006 V-TEX GATE Valve  
半導(dǎo)體 T/F ULVAC ULVAC PVD VAT SVA-008 SLIT Gate Valve NKV2-12U(50x336)
半導(dǎo)體 D/F       VAT SVA-009 DPN Slit Door 0040-44818REV004
半導(dǎo)體 ETCH TEL     V-TEX SVA-010 TEL SHUT DOORASSY 280-00081-11
半導(dǎo)體 ETCH TEL     VAT SVA-011 Producer GT 0750X-UA24-AIP2
半導(dǎo)體 ETCH TEL     VAT SVA-012 Producer GT. SLIT VLV ASSY S-INSRT
G67P MECH+REED SW 		0340X-CA24-BMP1
半導(dǎo)體 T/F TEL     SMC SVA-013 SMC Gate Valve XGT-0402BWN-X2
半導(dǎo)體 T/F       VAT SVA-014 Producer SE Slit Valve Module 0340X-CA24-BMB1
半導(dǎo)體 T/F AMAT     V-TEX SVA-015 Gate Valve NA(V060149
半導(dǎo)體 D/F   RTP   AMAT SVA-016 Slit Valve 0040-75863 REV003
半導(dǎo)體 T/F     HDP VAT SVA-017 Slit Valve 243788/0371 
半導(dǎo)體 D/F       VAT SVA-019 Gate Valve 258798
半導(dǎo)體         VAT SVA-020   A-682864
半導(dǎo)體 T/F AMAT P5000 CVD VAT SVA-101 Slit Valve AssemblyActuator. ZA Gate 0300-MA24
半導(dǎo)體 T/F AMAT Endura 5500
Endura Il 		SPD AMAT SVA-102 300mm Slit Valve Assembly 3020-00077
半導(dǎo)體 D/F AMAT RTO-06 DPN AMAT SVA-103 DPN Chamber Imner DoorA ssembly NCDO2B50-75DC
半導(dǎo)體 T/F AMAT Centura I DCA
(WCVD) 		W-CVD VAT SVA-104 A ssy neumatic Actuati onValve  243786/0443
半導(dǎo)體 T/F Novellus Concept 2 Altus W-CVD SMC SVA-105 Prcess Vodule Slit Valve XGT200-30-1A-X176
半導(dǎo)體 T/F Novellus INOVA   AMAT SVA-107 Slit Valve 03012-LA24-0001
02112-BA24-APNI
半導(dǎo)體   Novellus     VAT SVA-108 300mm NVLS DLCM Slit Valve 07512-UA24-ADI2
半導(dǎo)體 D/F HITACHI KOKUSAI   8 inch   MS-001 Rotation Axis Magnetic Seal 27975
半導(dǎo)體 IMP Varian 80
E-1000 		8 inch   MS-002 Main Drive Shaft 52-118199
52-121187
E19000940
半導(dǎo)體 PECVD Novellus C2 8 inch   MS-003 Spindle Feedthrough 52-131938
02-106507-00
半導(dǎo)體 CVD
D/F 		TEL   8 inch   MS-004 Spindle Feedthrough 60766Z
半導(dǎo)體 CVD
D/F 		TEL   12 inch   MS-005 Vacuum Feedthrough EKK046005
半導(dǎo)體 CVD
D/F 		TEL   8 inch   MS-006 Vacuum Feedthrough 024-014317-1
6011189
60770A
半導(dǎo)體 IMP Varian 80 8 inch   MS-007 WAFHAND Feedthrough 54-116667
半導(dǎo)體 IMP Axcelis HE3 12 inch   MS-008 Direct Drive Spindle Feedthrough 11029090
1193490
(軸長(zhǎng)445mm)
半導(dǎo)體 IMP Axcelis EATON 12 inch   MS-009 Belt Driver Spindle Feedthrough 1180900
11S5301
(軸長(zhǎng)369mm)
半導(dǎo)體 IMP Axcelis EATON 12 inch   MS-010 Belt Driver Spindle Feedthrough 52-117600
(軸長(zhǎng)357mm)
半導(dǎo)體 ETCH Varian 3180、3190、
3280、3290 		Sputter   MS-011 Retrofit sealing packages 54-116533
半導(dǎo)體 IMP Varian 80 8 inch   MS-012 Mass Slit feedthough 52-120755/E19003080
52-120756/E19003081
半導(dǎo)體   Vecoo       MS-013 Magnetic Seal 57-133133
半導(dǎo)體 IMP Varian   8 inch   MS-014 Magnetic Seal 54-117147
52-161761
52-121656
52-121761
52-107009
52-121660
半導(dǎo)體 IMP Varian E1000
M2000 		    MS-015 Magnetic Seal 52-121237
E17129050
半導(dǎo)體 IMP Varian 160
E500HP 		    MS-016 XP Spindle C-F4151001
半導(dǎo)體           MS-017 Magnetic Seal 51-105021
52-115736
半導(dǎo)體           MS-018 Magnetic Seal 26622C
H021776
半導(dǎo)體 IMP Varian E220     MS-019 Magnetic Seal 54-116667
半導(dǎo)體   Novellus       MS-020 Magnetic Seal V640108
CDC351
半導(dǎo)體 CVD  Novellus C3 12 INCH   MS-021 Vctor Spindle 02-276537-00
半導(dǎo)體 CVD  Novellus C3 12 INCH   MS-022 Vctor Spindle 02-324753-00
02-312735-00